Directed Self-assembly of Block Co-polymers for Nano-manufacturing
  • Author : Roel Gronheid
  • Release Date : 17 July 2015
  • Publisher : Woodhead Publishing
  • Genre : Technology & Engineering
  • Pages : 328
  • ISBN 13 : 9780081002612
  • Total Download : 228
  • File Size : 53,9 Mb

Directed Self-assembly of Block Co-polymers for Nano-manufacturing eBook PDF Summary

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques. Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields

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Author : Bruce W. Smith,Kazuaki Suzuki
Publisher : CRC Press
Total Download : 490
File Size : 41,6 Mb
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